Introduction of Piezo Phase Shifter
Piezo phase shifter (also known as piezo ceramics phase shifter) is designed based on piezo ceramics and realizes the phase shift function by driving the piezo ceramics to generate micro motion. Under the control of voltage signal, the nanoscale step motion is generated to complete the tiny phase shift motion required in the interference.
Phase shifting interferometry is a technique for measuring optical components by using interferograms. The core component is a phase shifter, which is generally driven by micro-displacement motion devices. Piezo phase shifters are widely used in all kinds of modern interference instruments various fields because of the excellent test accuracy.
Piezo phase shifter is driven by the piezo controller, and its displacement is linearly related to the voltage signal applied to it. The piezo phase shifter has the advantages of compact size, high precision, nanoscale high resolution, fast response speed, high stiffness, simple control and not affected by magnetic field.
Principle of Phase Shifter
The piezoelectric phase shifter, with a step of the order of nanometers, is used to drive the lens to move in parallel and change the optical path of the reference light, thus introducing a phase shift between the object light and the reference light.
Introduction of CoreMorrow Piezo Phase Shifter
CoreMorrow ZT35H80K piezo phase shifter is driven by piezo ceramic. The linear displacement is controlled by DC voltage signal and has displacement of about 0.7μm@150 V, which can be used for fast step phase shifting applications. The maximum driving voltage of the piezo phase shifter is 800V, and the displacement is about 3.73µm at this voltage.
The piezo phase shifter is specially designed for the corresponding shift applications. It can be adjusted by ultra-fast (µs) step by voltage control. At the same time, the deflection angle of θx and θy axis can be adjusted manually, and the angle adjustment range can be up to ±4°. The combination of lens adjustment and phase shifting step makes it more convenient for image shifting, interferometry and other applications.
Characteristics
- Combination of manual and piezo adjustment
- The phase shift stroke is about 0.7µm when the voltage is 150V
- The upper limit of the drive voltage is 800V
- The maximum phase shift displacement can reach 3.73 μm
- Manual adjustment of θx θy two-axis deflection angle
- Single axis adjustment angle range is 0~±4°
- Standard loadable lens diameter is 35mm, can be customized
Design of Piezo Phase Shifter
ZT35H80K Piezo Phase Shifter consists of two parts, a piezo actuator and a hand-adjusted screw. In order to ensure the high resolution of the ceramic can be directly output without the influence of external mechanical structure, the piezo phase shifter adopts piezo ceramics direct drive structure. For hand adjusting screw we adopts high precision screw and bushing to ensure the precision of manual adjustment.
The lens structure is adjustable
The lens fixing structure adopts replaceable design, which can be changed according to different application requirements, to suit different lens sizes.
Manual Fine-tuning Structure
Phase shifter has θx, θy two axis deflection, using manual fine-tuning screw operation, which is convenient. Single axis adjustment angle is up to ±4°/axis.
Applications
CoreMorrow piezo phase shifters can be applied to fast nano-stepping, phase shifting, optical path adjustment, interferometry, fast step adjustment, etc.
Technical Data
Model: ZT35H80K
Active axes: Piezo drive X
Manual θx、θy
Linear displacement: 0.7μm@150V
3.73μm@800V
Manual θxθy tilt angle: ±4°/axis
Unloaded resonant frequency: 47.8kHz
El.capacitance: 18nF
Standard loadable lens diameter:Φ35mm
Max.driving voltage: 0~800V
Mass: 175g
Driving Voltage and Displacement Curve
The phase shift function is mainly realized by internal piezo ceramics. The voltage displacement curve of piezo ceramics is as follows:
Custom Service
CoreMorrow can provide a variety of piezo phase shifters for phase shifting, stepping, interference, metering, etc., such as the types of ultra-small volume, clear aperture, large load type, large aperture diameter and other customized design based on the customer’s actual application.
